FinFET fin shape
Fin shape impact on FinFET leakage with application to … - Gaynor - Cited by 96
… flow shape in tapered (versus rectangular) FinFET on … - Nam - Cited by 32
… -thermal FinFET simulations including the fin shape … - Wang - Cited by 24
Featured snippet from the web
In sub 22-nm node technology, the fin shape of a FinFET is not perfectly rectangular but somewhat tapered . The tapered FinFET has a fin top width shorter than its fin bottom width. The angle between the side and the bottom of fin is similar to a trapezoid shape because of etching technique limitations.
People also ask
by A JyothiCited by 1 — ABSTRACT. FinFET has been a proven modification of the classical structure of MOSFETs to overcome short channel effect. But.
by BD Gaynor2014Cited by 95 — We show for the first time that fin shape significantly impacts transistor leakage in bulk tri-gate nFinFETs with thin fins when the fin body ...
Page(s): 2738 - 2744
by BD GaynorCited by 95 — We show that a triangular fin reduces leakage current by 70% over a rectangular fin with the same base fin width. We describe how fin shape can be used to ...
7 pages·2 MB
Apr 29, 2020 — Overview: Design technique for creating multi-threshold FinFET transistors via fin shape control. Technology: A process for modifying the ...
FinFET - Wikipedia
This article is about fin-shaped field-effect transistor. For Ferroelectric memory with a ferroelectric FET gate, see FeFET. A fin ...
In this paper, we investigate the impact of fin-shape, dimension, and geometry of tapered FinFET with 5-nm node. (N5) technology using TCAD simulation.
3 pages·516 KB
by K Biswas2018Cited by 24 — In this paper, the impact of various fin cross-sectional shape on junctionless accumulation mode bulk FinFETs with thin fins and short channel ...