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thermosetting adhesive wafer bond
Adhesive wafer bonding
Niklaus • 被引用次数:587
作者:R Puligadda被引用次数:67 — List of adhesives for temporary wafer bonding. Sample. Debonding method. Debonding temperature (ºC). Maximum thickness. (microns). Thermoplastic I.
18 页·855 KB
2006年2月9日 — Vitreous glasses are thermoplastic materials, which melt and flow at the same melting temperature each time they are thermally processed.
作者:N Frank2002被引用次数:43 — Vitreous glasses are thermoplastic materials, which melt and flow at the same melting temperature each time they are thermally processed. Glasses with curing ...
65 页·13 MB
Dry-etch BCB is a thermosetting polymer that undergoes cross-linking during ... BCB is used for low-temperature full wafer bonding in MEMS [25] and has the ...
作者:F Niklausa2006 — Polymers for adhesive wafer bonding. Polymer adhesives. Features. References. Epoxies. - thermosetting materials. - thermal curing and. 25, 27, ...
28 页·2 MB
作者:M Populin2007被引用次数:15 — In this paper we present for the first time the use of the thermosetting nano-imprint resist series mr-I 9000 as adhesive wafer bonding material suitable ...
Date Added to IEEE Xplore: 21 January 2008
DOI: 10.1109/MEMSYS.2007.4433057
Date of Conference: 21-25 Jan. 2007

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In adhesive wafer bonding, the polymer adhesive bears ... baked) or to partially cured thermosetting polymer adhesives. After wafer alignment and bonding, ...
作者:F Niklaus2001被引用次数:297 — Shores A A 1989 Thermoplastic films for adhesive bonding: hybrid microcircuit substrates Proc. Electronic Components Conf. (Houston, USA) pp 891-5.
The phenoxy resin may be a thermoplastic resin suitable for use as an adhesive in low temperature, e.g., less than 300° C., wafer bonding and/or laser ...

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